Oerlikon Leybold Vacuum USA, Inc.
5700 Mellon Road
Export, PA USA
T +1 724 327-5700
F +1 724 325-3577
The UNIVEX is a multi-purpose thin film coating system for the deposition of
high quality thin films onto user defined substrates. Its modular design with a
choice of chamber sizes and numerous accessories makes it the ideal tool
for a variety of R&D or small production applications.
UNIVEX systems have been standardized for improved reliability but can easily be reconfigured for changing process requirements. This flexibility enables
upgrades or retrofits as needs change over time.
The UNIVEX base system consists of a process module with the vacuum
chamber, deposition components, and vacuum pump system. The control
module includes the PLC, PC controller with HMI visualization and the power
supplies for the process components.
Materials Science O Nanotechnology O Thin Film Coatings O;Superconductors
UNIVEX 400 Box Coater
Compact, high performance systems
for vacuum PVD coating processes
Thin film deposition units