. 11. 2
The UNIVEX is a multi-purpose thin film coating system for the
deposition of high quality thin films onto user defined substrates.
Its modular design with a choice of chamber sizes and numerous
accessories makes it the ideal tool for a variety of R&D or small
UNIVEX systems have been standardized for improved reliability but
can easily be reconfigured for changing process requirements. This
flexibility enables upgrades or retrofits as needs change over time.
The UNIVEX base system consists of a process module with the
vacuum chamber, deposition components, and vacuum pump system. The control module includes the PLC, PC controller with HMI
visualization and the power supplies for the process components.
Thin film deposition units
UNIVEX - Vacuum Coating Systems for
Materials Science l Nanotechnology l
Thin Film Coatings l Superconductors
UNIVEX 400 Box Coater
Compact, high performance systems
for vacuum PVD coating processes